---------------------------------------------------------------------------

【日　時】平成22年6月11日（金）午後5時10分〜6時10分

【会　場】東京工業大学すずかけ台キャンパス

　　　　　Ｊ２棟20階　中会議室

　　　（横浜市緑区長津田町4259、最寄り駅：東急田園都市線すずかけ台駅）

【講演者】Prof. Arun Chandorkar(Indian Institute of Technology, Bombay)

【タイトル】

" Some studies of Characteristics of MIM and MOS devices with Hafnium

Oxide and Aluminum Oxide as dielectrics, under Electrical and Radiation

stress"

【概要】

The Scaling of Technology node down towards 22 nm has created problem

of reduced Gate Insulator thickness below 5 Angstrom.

To realise MOS device at those Technology nodes one needs to replace

most popular gate insulator SiO2 by Insulators with Higher Dielectric

constant( High-K) so as to achieve EOT of the order of 0.5 nm or below.

We have recently been working on two such High-K Dielectrics namely

Hafnium Silicon Dioxide stack and Al2O3. The proposed devices for our

study are MIM and MOS capacitors using these insulators as dielectric

Layers.

We present some of our findings of Device Characteristics under

ElectricalStress and also after exposure to High Energy radiation from

gamma source.

The work is shared between laboratories of IIT Bombay and NJIT, New

Jersey,USA.

【略歴】

Arun N. Chandorkar is Professor of Electrical Engineering at Indian

Institute of Technology, Bombay, India. He received the Ph.D. in

Electrical Engineering in 1977 from C.E.E.R.I., Pilani. He worked at

Tata Institute of Fundamental Research from 1978 to 1983, where he was a

member of a group which was pioneer in developing India's first 5μm

CMOS technology.

Earlier both at IIT Kanpur and at CEERI, Pilani, he worked on Microwave

semiconductor devices, Gunn diodes and S-band PIN diodes.

Currently his research interests include VLSI Technology,

VLSI Design in particular Analog/RF Design, High-K Dielectrics for Nano

CMOS and radiation effects in MOS devices.

He is also working in ares of Photonics as well. He has contributed

severalpapers in all the above areas.

He was the Head of the Department of Electrical Engineering at IIT

Bombay during the period 1994 - 1997. He was Member of IIT Bombay's

Board of Governors for 2 years.

As a Convener of IIT Indore, he has been instrumental in setting up of

India's latest new IIT at Indore.

He has been the Chief Investigator in several sponsored projects, and

has interacted with industry in the areas of Technology as well as

Design.Among many awards he received, most important being IIT Bombay's

" BestTeacher- Excellence in Teaching award".

連絡先

---------------------------------

東京工業大学

フロンティア研究機構

　岩　井　　　洋

-------------------------------